پایان نامه تحلیل دینامیکی میکروتیر یکسر گیردار در محفظه بسته حاوی سیال تراکم ناپذیر

فهرست:

فهرست شکل ها............................................................................................................................................................................. ج

فهرست جداول............................................................................................................................................................................... خ

فصل اول: مفاهیم وکلیات                                                                                            1

1-1  تفاوت MEMS  با سیستمهای ماکرو......................................................................................................................... 5

1-2کاربردهای MEMS............................................................................................................................................................. 7

1-2-1کاربرد در صنعت خودرو................................................................................................................................................. 7

1-2-2 کاربرد در پزشکی............................................................................................................................................................ 8

1-2-3کاربرد در الکترونیک........................................................................................................................................................ 8

1-3سیستم‌های جدید مرتبط با MEMS............................................................................................................................ 9

1-3-1سیستم های میکروالکترومکانیکی زیستی................................................................................................................. 9

1-3-2سیستم‌های میکرواپتوالکترومکانیکی ........................................................................................................................ 9

1-3-3: سیستم‌های میکروالکترومکانیکی فرکانس بالا....................................................................................................... 9

1-4  میکرومحرکها..................................................................................................................................................................... 12

1-4-1 محرکهای الکترواستاتیکی.......................................................................................................................................... 13

1-4-2  محرکهای گرمائی........................................................................................................................................................ 14

1-4-3  پنوماتیک گرمائی........................................................................................................................................................ 14

1-4-4 سایر محرکها.................................................................................................................................................................. 15

1-5  تکنولوژی میکرو ماشینکاری......................................................................................................................................... 15

1-6  تکنیکهای میکروماشینکاری........................................................................................................................................... 16

1-6-1 میکروماشینکاری حجمی........................................................................................................................................... 17

1-6-2 میکروماشینکاری سطحی........................................................................................................................................... 20

1-6-3 روش چسباندن لایه ای.............................................................................................................................................. 22

1-7  پایداری MEMS............................................................................................................................................................ 23

1-8 مزایا و معایب MEMS................................................................................................................................................... 23

فصل دوم: پیشینه تحقیق                                                                                            27

2-1مروری بر کلیات تاریخچه(MEMS)................................................................................................................................. 27

2-2 تحقیقات قبلی در رابطه با پدیده ناپایداری در ساختارهای MEMS..................................................................... 28

2-3 تحقیقات قبلی در رابطه با آنالیز فرکانسهای طبیعی ساختارهای MEMS......................................................... 30

2-5 تحقیقات قبلی در رابطه با بررسی اثر ولتاژ آنیدر ساختارهای MEMS............................................................... 30

2-6 کارهای انجام شده مرتبط با پروژه................................................................................................................................ 31

فصل سوم: توصیف مدل و استخراج معادلات حاکم برمسئله                                                34

3-1معرفی مدل مورد مطالعه.......................................................................................................... 34

3-2 مدلسازی ریاضی برای محرکهای میکروالکترومکانیکی الکترواستاتیکی............................................................. 35

3-3 فرمولبندی برای ارتعاشات سیال................................................................................................................................... 38

3-4ارتعاشات کوپل شده سیستم........................................................................................................................................... 43

3-5 حل مقدار ویژه سیستم (ارتعاشات آزاد)..................................................................................................................... 44

3-6 روابط جرم افزوده.............................................................................................................................................................. 45

فصل چهارم: نتایج عددی و بحث                                                                                   47

4-1 بازبینی و تصدیق روش ارائه شده برای سیال نامحدود.......................................................................................... 47

4-2 نتایج عددی ومباحثه برای ارتعاشات آزاد.................................................................................................................. 48

4-3 نتایج عددی و مباحثه برای ارتعاشات اجباری  با اعمال ولتاژ آنی...................................................................... 60

فصل پنجم: نتیجه گیری و پیشنهاد                                                                               66

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